APPARATUS FOR MANUFACTURING THIN FILM SOLAR CELL

摘要

An apparatus for manufacturing a thin film solar cell has a film-forming chamber wherein air is released for depressurization and a film is formed on a substrate by a CVD method; a loading/unloading chamber, which is connected to the film-forming chamber with a first opening/closing section therebetween, and switches between atmospheric pressure and reduced pressure; a transfer rail arranged in the film-forming chamber and the loading/unloading chamber; a carrier which holds the substrate and moves along the transfer rail; and a carrier transfer mechanism for transferring the carrier.  The carrier transfer mechanism is arranged in the loading/unloading chamber and transfers the carrier between the film-forming chamber and the loading/unloading chamber.