| 发明名称 |
APPARATUS FOR MANUFACTURING THIN FILM SOLAR CELL |
| 摘要 |
<p>An apparatus for manufacturing a thin film solar cell is provided with a film-forming chamber wherein a substrate is stored; and an electrode unit wherein a film is formed on the substrate by a CVD method in the film forming chamber. The electrode unit has an anode and a cathode; and a side wall section, which holds the anode and the cathode and forms a part of a wall section of the film-forming chamber, and furthermore, is attachable/detachable to and from the film-forming chamber.</p> |
| 申请公布号 |
WO2009148087(A1) |
申请公布日期 |
2009.12.10 |
| 申请号 |
WO2009JP60168 |
申请日期 |
2009.06.03 |
| 申请人 |
ULVAC, INC.;SHIMIZU YASUO;OGATA HIDEYUKI;MATSUMOTO KOICHI;NOGUCHI TAKAFUMI;WAKAMORI JOUJI;OKAYAMA SATOHIRO;MORIOKA YAWARA;SUGIYAMA NORIYASU;SHIGETA TAKASHI;KURIHARA HIROYUKI |
发明人 |
SHIMIZU YASUO;OGATA HIDEYUKI;MATSUMOTO KOICHI;NOGUCHI TAKAFUMI;WAKAMORI JOUJI;OKAYAMA SATOHIRO;MORIOKA YAWARA;SUGIYAMA NORIYASU;SHIGETA TAKASHI;KURIHARA HIROYUKI |
| 分类号 |
H01L31/04;C23C16/50;H01L21/205 |
主分类号 |
H01L31/04 |
| 代理机构 |
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