发明名称 APPARATUS OF INSPECTING ELECTRIC CONDITION, AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: An apparatus for inspecting electric condition and a method for manufacturing the same are provided to match impedance of signal lines by adjusting line width of a signal line or gap between the signal line and a ground. CONSTITUTION: An apparatus(100) for testing electric condition comprises a substrate structure(110), probes(141,142,143,144) and a channel terminal(101). The substrate structure connects DUTs(Device Under Test)(151,152,153,154) electrically connected to the probes and a tester(10) judging electric state of the DUTs. The substrate structure is a single substrate. The probes are located on one side(130a) of the substrate structure. The channel terminal is located on the other side(120a) of the substrate structure. The substrate structure comprises a first substrate(120) and a second substrate(130). The channel terminal electrically contacts the test during electric condition investigation process.
申请公布号 KR100930989(B1) 申请公布日期 2009.12.10
申请号 KR20080057372 申请日期 2008.06.18
申请人 TSC MEMSYS CO., LTD. 发明人 PARK, JUNG KEUN;SONG, JU HAN
分类号 G01R31/28;G01R27/00 主分类号 G01R31/28
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