| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a multilayer film utilizing a production process using an etching technique, and to provide an etching film production device therefor. <P>SOLUTION: Disclosed are a method for producing a multilayer film utilizing a production process using an etching technique, and an etching film production device therefor. In this invention, the volatilization speed of the etching liquid in the second layer etching liquid is accelerated, and the phenomenon that the solvent of the second layer etching liquid drops by overheating, and the original organic molecule film is dissolved is prevented. This device includes an organic vessel having a crevice, a heater and an intake valve. The organic vessel is used for containing the etching liquid of organic molecules. This organic vessel can adjust the intervals between a substrate and a substrate using a machine, and can control a thickness made in a wet thin film by the intervals. The intake valve is set on the organic vessel, and is used for adjusting the amount of an organic solution flowing through the crevice. The heater is placed on either part of the organic vessel, and is used for accelerating the volatilization of the vessel and the speed of thin film formation. <P>COPYRIGHT: (C)2010,JPO&INPIT |
