发明名称 OPTICAL ELEMENT HOLDING DEVICE, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical element holding device capable of reproducing predetermined figure tolerance by reducing surface deformation amount of an optical element having an optical axis extending in a direction crossing a gravity direction when taking out the optical element from a lens barrel, subjecting it to machining, and mounting it in the lens barrel again. <P>SOLUTION: The optical element holding device includes: the optical element having the optical axis extending in the direction crossing the gravity direction; a holding base having a holding surface which bears gravity of the optical element; a pedestal arranged between an outer periphery of the optical element and the holding surface of the holding base, having a plane on the outer periphery side and having a spherical surface or a cylindrical surface coming into contact with the holding surface; and an elastic member arranged between the outer periphery of the optical element and the plane of the pedestal. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009288571(A) 申请公布日期 2009.12.10
申请号 JP20080141750 申请日期 2008.05.29
申请人 CANON INC 发明人 MIYAZAKI KYOICHI
分类号 G02B7/00;G02B7/02;G02B7/182;G03F7/20;H01L21/027 主分类号 G02B7/00
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