发明名称 LIGHT IRRADIATING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a light irradiating apparatus that uniformizes and emits light even when the amount of incident light is small. <P>SOLUTION: An opening portion of a throttle plate of a light irradiating apparatus has a shape composed of: a first pattern 101 having a slit the width of which continuously and gradually decreases or increases; and a second pattern 102 formed at least in the vicinity of a portion, which has a slit width equal to or smaller than a prescribed value, of the first pattern so that the area through which emitted light can pass gradually decreases or increases in combination with the first pattern having the gradually decreasing or increasing slit width. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009289910(A) 申请公布日期 2009.12.10
申请号 JP20080139693 申请日期 2008.05.28
申请人 MEJIRO PRECISION:KK 发明人 KANEKO TAKAYOSHI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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