| 摘要 |
PROBLEM TO BE SOLVED: To provide the semiconductor device manufacturing equipment for raising the working efficiency of maintenance works without using a vacuum pump to attain cost down and realize space-saving, thereby, obtaining the excellent economical and spatial efficiency. SOLUTION: An ejector 8 is incorporated into a vacuum holding unit 6. The ejector generates negative pressure, i.e. vacuum by flowing compressed air, and adsorbs a semiconductor device S. An electromagnetic valve 9 for turning on-off the ejector 8 is installed at the positive pressure side of the ejector 8. A dust catcher 11 is connected to the gas discharge side of the ejector 8. COPYRIGHT: (C)2010,JPO&INPIT |
