| 摘要 |
PROBLEM TO BE SOLVED: To provide a protective film for a die surface capable of achieving the high plastic deformation hardness and the high peeling critical load, and preventing the seizure with a workpiece for prolonging the lifetime of a metal working die, and to suppress the cost for an evaporation source when forming the protective film by using a vapor phase thin film depositing method. SOLUTION: The protective film for the die surface is formed on a metal surface, and consists of a compound of a nitride of a transition metal element and a molybdenum nitride; a compound of a titanium-containing nitride and a molybdenum nitride; a compound of a titanium-containing nitride of any one of TiN, (Ti, Al)N, and CrN and a molybdenum nitride of MoN; a compound expressed as (Ti<SB>a</SB>, Mo<SB>b</SB>)N<SB>1-a-b</SB>, where a and b denote the atomic ratio, and the Mo containing ratio Mo/(Mo+Ti) is 20-60%; or a compound expressed as ((TiAl)<SB>a</SB>, Mo<SB>b</SB>)N<SB>1-a-b</SB>, where a and b denote the atomic ratio, and the Mo containing ratio Mo/(Mo+Ti+Al) is 40-80%. The film is applied to a die for processing at the temperature of ≤500°C. COPYRIGHT: (C)2010,JPO&INPIT
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