| 摘要 |
A method for forming a uniform and dense carbon nanotube-dispersed film irrespective of the characteristics of the carbon nanotube-dispersed liquid and the type of substrate, and a method for manufacturing a semiconductor device having excellent electrical characteristics with less variation in characteristics are provided. The method for forming the carbon nanotube-dispersed film includes steps of coating a substrate (110) with a carbon nanotube-dispersed liquid containing carbon nanotubes (1101) dispersed in a solvent, cooling droplets (102) of the carbon nanotube-dispersed liquid to increase the viscosity of the solvent, evaporating the solvent to uniformly precipitate the carbon nanotubes (1101) and form a carbon nanotube coating film (1012), forming, on the carbon nanotube coating film (1012), a coating film of a carbon nanotube-dispersed liquid (1013) with higher carbon nanotube concentration, and evaporating the solvent from the coating film of carbon nanotube-dispersed liquid (1013) to form a film having dispersed carbon nanotubes (1022).
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