| 摘要 |
An optical measuring instrument captures an image of an object to be measured mounted on a table by moving an objective lens relative to the table and measures a dimension of the object based on the captured image of the object. The optical measuring instrument includes a reflective photoelectric sensor provided around the objective lens for detecting the approach of the object to the objective lens, and a collision avoidance unit for avoiding collision of the objective lens with the object when the reflective photoelectric sensor detects the approach of the objective lens to the object.
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