| 摘要 |
Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N- type doping. The wafers can be improved by etching them, especially in a plasma assisted process, with fluorine, carbonyl fluoride or NF3. Hereby, the surface is roughened so that the degree of light reflexion is reduced, cracks caused from the sawing operation are prevented from proliferation, and glass-like phosphorous-containing oxide coatings caused by phosphorous doping are removed. |
