| 摘要 |
<p>A multilayer mirror is constructed and arranged to reflect radiation having a wavelength in the range of 2-8 nm. The multilayer mirror has alternating layers selected from the group consisting of: Cr and Sc layers, Cr and C layers, C and B4C layers, U and B4C layers, Th and B4C layers, C and B9C layers, La and B9C layers U and B9C layers, Th and B9C layers, La and B layers, C and B layers, U and B layers, and Th and B layers.</p> |
| 申请人 |
ASML NETHERLANDS B.V.;GLUSHKOV, DENIS;BANINE, VADIM;MOORS, JOHANNES, HUBERTUS, JOSEPHINA;SJMAENOK, LEONID, AIZIKOVITCH;SALASCHENKO, NIKOLAI NIKOLAEVICH |
发明人 |
GLUSHKOV, DENIS;BANINE, VADIM;MOORS, JOHANNES, HUBERTUS, JOSEPHINA;SJMAENOK, LEONID, AIZIKOVITCH;SALASCHENKO, NIKOLAI NIKOLAEVICH |
