ORGANIC SILICON OXIDE FINE PARTICLE AND METHOD FOR PRODUCING THE SAME, COMPOSITION FOR FORMING POROUS MEMBRANE, POROUS MEMBRANE AND METHOD FOR PRODUCING THE SAME, AS WELL AS SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an organic silicon oxide fine particle etc. capable of forming a porous membrane satisfying an expected dielectric constant and mechanical strength to obtain a highly efficient porous insulation film and excellent in chemical stability.

SOLUTION: The organic silicon oxide fine particle consists of an inner core comprised of a first organic silicon oxide containing an organic group having an inorganic silicon oxide or a carbon atom directly bound with a silicon atom, and has in the circumference of the inner core an outer core comprised of a second organic silicon oxide, that is different from the first organic silicon oxide and is obtained by hydrolyzing condensation, in the presence of a catalyst, of an outer core-forming component comprised of an organic group-containing hydrolyzable silane having a carbon atom directly bound with a silicon atom or of a mixture of the organic group-containing hydrolyzable silane and an organic group non-containing hydrolyzable silane having not the organic group, and the ratio of the total number of carbon atom [C] to the total number of silicon atom [Si], [C]/[Si] is≥0 and <1 in the inner core and≥1 in the outer core.

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