发明名称 TRANSFER DEVICE, PRESS APPARATUS, AND POSITION ATTITUDE ADJUSTMENT MECHANISM
摘要 PROBLEM TO BE SOLVED: To minimize the size of a transfer device to transcribe a micro transfer pattern formed in a mold to an article to be molded as much as possible. SOLUTION: The transfer device includes a holding body 3 of an article to be molded holding the article to be molded W, a mold-holding body 5 holding the mold M and moving relatively in a direction of approaching to/seceding from the holding body 3 of the article to be molded, and a driving mechanism 7 provided in parallel to the holding body 3 of the article to be molded and the mold-holding body 5 in the above moving direction to move relatively the mold-holding body 5. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009286067(A) 申请公布日期 2009.12.10
申请号 JP20080143523 申请日期 2008.05.30
申请人 TOSHIBA MACH CO LTD 发明人 ITANI SHINYA;FUJIWARA SHIGERU;KOKUBO MITSUNORI;SUGIURA HIROYOSHI
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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