摘要 |
PROBLEM TO BE SOLVED: To minimize the size of a transfer device to transcribe a micro transfer pattern formed in a mold to an article to be molded as much as possible. SOLUTION: The transfer device includes a holding body 3 of an article to be molded holding the article to be molded W, a mold-holding body 5 holding the mold M and moving relatively in a direction of approaching to/seceding from the holding body 3 of the article to be molded, and a driving mechanism 7 provided in parallel to the holding body 3 of the article to be molded and the mold-holding body 5 in the above moving direction to move relatively the mold-holding body 5. COPYRIGHT: (C)2010,JPO&INPIT
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