| 摘要 |
PROBLEM TO BE SOLVED: To quickly and simply perform high-accuracy measurement. SOLUTION: An MLA 12 is two-dimensionally arranged on the pupil surface of a lens 11, and an image sensor 13 includes a plurality of two-dimensionally arranged pixels having a photoelectric conversion function, each of which is arranged at a position being on the rear side of each ML of the MLA 12, and conjugate with an object to be inspected. Concerning a plurality of images having respectively different points of view obtained by picking up with the image sensor 13 images formed by the individual MLs of the MLA 12, an arithmetic processing circuit 34 computes a parallax for each characteristic point being noted inside the respective images, and finds information on the depth of the object to be inspected from those parallaxes. This notion can be applied to distance measuring devices for measuring objects to be inspected. COPYRIGHT: (C)2010,JPO&INPIT
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