| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a catalyst material suppressing charge-up of a substrate surface without lowering discharge voltage, and a vacuum arc evaporation device. Ž<P>SOLUTION: In one embodiment of the present invention, an arc evaporation source is used, the arc evaporation source having a cylindrical insulation member 23, a metallic evaporation material 21 having catalytic activity disposed on the outer periphery of the insulation member, a trigger electrode 22 disposed on the outer periphery of the insulation member, and a cylindrical anode electrode 24 concentrically disposed around the trigger electrode. A substrate W formed with a carbon-based material layer C on the surface is prepared. Particles of the evaporation material are formed by discharge control between the evaporation material in the arc evaporation source and the cylindrical electrode in a pressure-reduced atmosphere, and attached on the surface of the carbon-based material layer. Electrons are supplied to the pressure-reduced atmosphere from an electron supply source 40 in synchronization with the discharge control in the arc evaporation source. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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