| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry-type cleaning apparatus of which the cleaning efficiency is improved by making much more cleaning mediums collide with an object to be cleaned through preventing the cleaning mediums from clogging the inside of the apparatus and from staying in the apparatus when dry-type cleaning is performed by using the thin-piece-shaped cleaning mediums. SOLUTION: The dry-type cleaning apparatus is provided with inner walls 1a-1g of a cleaning vessel 13 housing the object to be cleaned 3 and the thin-piece-shaped flexible cleaning mediums 5, and a cleaning medium accelerating nozzle 6 making the cleaning mediums 5 collide with the object to be cleaned 3 by jetting a high speed air current so that sticking materials stuck to the object to be cleaned are removed, while the inner walls 1a and 1b are constituted of a material having flexibility. COPYRIGHT: (C)2010,JPO&INPIT
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