| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a structure, can prevent deterioration in the characteristics of an element formed on an element substrate, and to provide a method for manufacturing a light-emitting device. <P>SOLUTION: The method for manufacturing a structural body includes steps of forming an element substrate 40, having a concave portion 42 on a jointing surface side between itself and a substrate (functional substrate) 30 for light distribution; forming a light-receiving element 4 as an element on the inner bottom surface of the concave portion 42 in the element substrate 40; arranging the element substrate 40 and the substrate 30 for light distribution so that the jointing surfaces of the element substrate 40 and the substrate 30 for light distribution oppose each other; allowing a single-beam irradiation source 100, disposed in a direction orthogonal to the opposing direction of both to irradiate a space between the element substrate 40 and the substrate 30 for light distribution with the ion beams of an inert gas or atomic beams of an inert gas, to clean and activate each of the jointing surfaces; and superimposing the element substrate 40 to the substrate 30 for light distribution and jointing them. Then, a base substrate on which a light-emitting element is mounted is jointed to the substrate 30 for light distribution. <P>COPYRIGHT: (C)2010,JPO&INPIT |
