| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS variable capacitor which brings a movable electrode stably in contact with a fixed electrode over a wide temperature range, ensures excellent reproducibility and reliability, and have a large maximum capacitance value. <P>SOLUTION: The MEMS variable capacitor includes: a first connection beam whose one end is fixed to a substrate, a first drive beam connected to the first connection beam, a second drive beam which is connected to the first drive beam and extends in the opposite direction, a second connection beam whose one end is fixed to the substrate, a third drive beam connected to the second connection beam, a fourth drive beam which is connected to the third drive beam and extends in the opposite direction, a movable electrode provided between the ends of the second and fourth drive beams, and a fixed electrode provided on the substrate to face the movable electrode. The first to fourth drive beams comprise a piezoelectric film sandwiched between a lower electrode and an upper electrode. The first and third drive beams are arranged on a line, the second and fourth drive beams are arranged on a line, and the first and second drive beams are axisymmetrically arranged to the third and fourth drive beams. <P>COPYRIGHT: (C)2010,JPO&INPIT |
