发明名称 |
SHORT PULSE ATMOSPHERIC PRESSURE GLOW DISCHARGE METHOD AND APPARATUS |
摘要 |
Method and plasma generating apparatus for generating an atmospheric pressure glow discharge plasma in a treatment space (5) filled with a gas composition. Two electrodes (2, 3) are connected to a power supply (4) for providing electrical power during an on-time (ton). The power supply (4) is arranged to provide a periodic signal with an on-time (ton) which is shorter than a predetermined time period, the predetermined time period corresponding substantially to the time necessary for a dust coagulation center from the gas composition to become a cluster in the treatment space (5). This method and apparatus may be used for depositing a layer of material on a substrate (6) in the treatment space (5).
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申请公布号 |
US2009304949(A1) |
申请公布日期 |
2009.12.10 |
申请号 |
US20070278905 |
申请日期 |
2007.02.09 |
申请人 |
DE VRIES HINDRIK WILLEM;ALDEA EUGEN;VAN DE SANDEN MAURITIUS CORNEL |
发明人 |
DE VRIES HINDRIK WILLEM;ALDEA EUGEN;VAN DE SANDEN MAURITIUS CORNELIUS MARIA |
分类号 |
C23C16/513;C23C16/00;H05H1/24 |
主分类号 |
C23C16/513 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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