Systems and methods to detect electrons from one or more samples are disclosed. In some embodiments, the systems and methods involve one or more magnetic field sources.
申请公布号
WO2009148881(A2)
申请公布日期
2009.12.10
申请号
WO2009US45145
申请日期
2009.05.26
申请人
CARL ZEISS SMT INC.;HILL, RAYMOND;NOTTE IV, JOHN, A.