发明名称 QUANTUM-TYPE IR SENSOR AND QUANTUM-TYPE IR GAS CONCENTRATION METER USING SAME
摘要 <p>Disclosed are a quantum-type IR sensor, which is small and has a simple element shape and can be used for performing reliable measurements despite flow rate variations, temperature variations, or other disturbances or variations in a measured gas, and a gas concentration meter using said sensor. The sensor is equipped with a pair of quantum-type IR sensor elements (13a, 13b), a pair of optical filters (16a, 16b), and a holding member (15). The pair of optical filters (16a, 16b) is provided on the IR light source side with respect to the pair of quantum-type IR sensor elements (13a, 13b). Each filter selectively transmits IR radiation in a specific, different wavelength region. The filters are accommodated in the upper section of the holding member (15) and are provided facing the pair of quantum-type IR sensor elements (13a, 13b) via a pair of through-holes (15a, 15b). It is also possible to perform quantitative analysis of gas concentration based on the Lambert-Beer law by using the quantum-type IR sensor with the aforementioned configuration.</p>
申请公布号 WO2009148134(A1) 申请公布日期 2009.12.10
申请号 WO2009JP60285 申请日期 2009.06.04
申请人 ASAHI KASEI MICRODEVICES CORPORATION;KUZE NAOHIRO;TOKUO SEIICHI;YANAGITA YOSHINORI 发明人 KUZE NAOHIRO;TOKUO SEIICHI;YANAGITA YOSHINORI
分类号 H01L31/0232;G01N21/61 主分类号 H01L31/0232
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