| 摘要 |
[Problems] To provide a visual inspection system able to greatly suppress the increase of the amount of processing and detect scratches or other defects of the surface of an object being inspected by a suitable resolution and able to judge the state of formation of films on that object surface. [Means for Solution] A system having an imaging unit 20 provided with a plurality of line sensors 22R, 22G, and 22B differing in color sensitivity characteristics and a processing unit 50, the processing unit 50 having a pixel data acquiring means (S14) acquiring pixel density data from a density signal from a reference line sensor by a first pixel density and pixel density data from density signals from the line sensors other than the reference line sensor by a second pixel density lower than the first pixel density and generating information showing the state of the object surface based on the pixel density data acquired by the first pixel density and the pixel density data acquired by the second pixel density.
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