| 摘要 |
<p>PURPOSE: A chamber assembly is provided to change the rod length of the gas spring and to vary open and close angle of the cover member. CONSTITUTION: The process chamber(110) offers the space for being proceed processing against substrate. And opening is had on the top. The cover member(120) is hinge-coupled on the top of the process chamber and opens and closes opening. The gas spring(130) is connected between the process chamber and cover member. And open and close operation of the cover member is supported. The gas spring comprises the sliding-operate through one end of cylinder and the cylinder(132) in which the oil or the gas is filled to the inner side and outside of cylinder load(134). The length of the load can be changed.</p> |
