APPARATUS AND METHOD FOR ELLIPSOMETRY

摘要

PURPOSE: An ellipse analyzer and an ellipsometric method are provided to accurately measure the surface property of a mask without removing pellicle. CONSTITUTION: An ellipse analyzer(100) comprises a polarized light projecting part(10), a polarized light analysis part(20) and a polarized light compensation part. The polarized light projecting part projects the polarized light to specimens including a protective cover. The polarized light analysis part analyzes the light reflected to the surface of the specimen. The polarized light compensation part is arranged on the travel route of the light. The polarized light compensation part compensates the change of the polarized light state of light generating while the light passes through the protective cover. The polarized light compensation part comprises a first compensation member(31) and a second compensation member(32). The first compensation member is arranged on the incident route of the light. The first compensation member polarizes the amount of change of the first polarized light state. The second compensation member polarizes the amount of change of the second polarized light state.