Methods for adjusting and evaluating light intensity distribution of illumination apparatus, illumination apparatus, exposure apparatus, and device manufacturing method

摘要

A method is provided for adjusting a first light intensity distribution formed on a pupil plane of an illumination apparatus. The method includes measuring a first light intensity distribution; obtaining a first light intensity radial distribution and a second light intensity radial distribution; obtaining a first cumulative light quantity distribution in a radial direction and a second cumulative light quantity distribution in the radial direction; obtaining a difference at each of at least three points between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction; and adjusting the first light intensity distribution based on the difference between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction.