| 摘要 |
A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).
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