| 摘要 |
An object of the invention is to implement an IC tester wherein an analog test module can be provided at a test head while maintaining flexibility of the test head. The IC tester comprises an analog test module for testing an analog signal against the device under test. The analog test module comprises a main substrate, connected to the device under test, a first sub-substrate connected to the main substrate, the first sub-substrate comprising first analog circuits and first digital circuits electrically connected to the first analog circuits, wherein an analog test is conducted by the first analog circuits, and the first digital circuits, and a second sub-substrate connected to the main substrate, the second sub-substrate comprising second analog circuits and second digital circuits electrically connected to the second analog circuits, wherein an analog test is conducted by the second analog circuits, and the second digital circuits.
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