发明名称 Illumination system for optical inspection
摘要 Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
申请公布号 US7630069(B2) 申请公布日期 2009.12.08
申请号 US20060394218 申请日期 2006.01.23
申请人 APPLIED MATERIALS, INC. 发明人 NAFTALI RON;GUETTA AVISHAY;FELDMAN HAIM;SHOHAM DORON
分类号 G01N21/00;G01N21/47;G01N21/88;G01N21/95;G01N21/956;G02B27/48 主分类号 G01N21/00
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