发明名称 |
Multiple beam micro-machining system and method |
摘要 |
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
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申请公布号 |
US7629555(B2) |
申请公布日期 |
2009.12.08 |
申请号 |
US20030652688 |
申请日期 |
2003.09.02 |
申请人 |
ORBOTECH LTD |
发明人 |
GROSS ABRAHAM;KOTLER ZVI;LIPMAN ELIEZER |
分类号 |
B23K26/06;G02B26/08;B23K26/00;B23K26/067;B23K26/073;B23K26/38;B23K101/42;G02B27/14;G02F1/33;H01S3/00;H01S3/11;H05K3/00 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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