| 摘要 |
<p>PURPOSE: A driving force transfer unit and a substrate transport apparatus including the same are provided to simplify the configuration to transfer driving force to a first magnetic roller, by connecting a second magnetic roller to a driver unit directly. CONSTITUTION: First magnets are formed around a first magnetic roller. A driver unit(320) generates driving force to rotate the first magnetic roller. A second magnetic roller(330) transfers the driving force to the first magnetic roller. The driver unit comprises a motor(322) generating torque and a dynamic power transmission(324). The dynamic power transmission connects the motor and the other side of the second magnetic roller through a belt. The other side of the second magnetic roller has a connection groove where the belt is connected.</p> |
