发明名称 CONVEYOR ROLLER AND SUBTRATE TRANSFERRING APPARATUS WITH IT
摘要 <p>PURPOSE: A disengagement prevent element is provided to prevent the secession of the rolling member using the disengagement prevent element. CONSTITUTION: The through hole formed in the center of the rolling member(112) is the disc shape and is contacted with substrate. The shaft(104) is inserted into the through hole. The fixing member is combined with the rolling member and fixes the rolling member on shaft. The disengagement prevent element(130) prevents the fixing member from being deviated from the rolling member of shaft. The rolling member is expended according to the inner surface of the through hole as the cylindrical shape. The connecting part in which the screw thread is formed in the outer circumference is included. The fixing member is combined with the connecting part.</p>
申请公布号 KR20090125983(A) 申请公布日期 2009.12.08
申请号 KR20080052103 申请日期 2008.06.03
申请人 SEMES CO., LTD. 发明人 LEE, KIL WOO
分类号 H01L21/68;H01L21/677;H01L21/683 主分类号 H01L21/68
代理机构 代理人
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