| 摘要 |
<p>PURPOSE: A chamber assembly is provided to simplify the structure of facility and integrate the sensing unit with the fixing member. CONSTITUTION: The chamber(110) offers the space for being proceed processing against substrate. And the opening is had on the top. The cover(120) is hinge-coupled on the top of the chamber and opens and closes opening. The bar shaped fixing member(130) is installed on the top of the chamber to rotate the fixing member. The bar shaped fixing member moves to the top of cover if the cover is closed and fixed. While being integrately installed in the fixing member, the location of the fixing member and the sensing unit(140) is confirmed.</p> |
