发明名称 |
Apparatus and method for controlling ion beam |
摘要 |
An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.
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申请公布号 |
US7629589(B2) |
申请公布日期 |
2009.12.08 |
申请号 |
US20070703130 |
申请日期 |
2007.02.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HWANG SUNG-WOOK;LEE DO-HAING;SHIN CHUL-HO;SUN JONG-WOO |
分类号 |
G21K1/08;H01J1/36;H01J1/46 |
主分类号 |
G21K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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