发明名称 Method of fabricating a semiconductor device with a dopant region in a lower wire
摘要 A semiconductor device and a method of fabricating the same are disclosed. The semiconductor device includes a lower wire, an interlayer insulating film formed on the lower wire and having a via hole exposing the upper surface of the lower wire, a diffusion barrier formed on the inner wall of the via hole, and an upper wire filling the via hole and directly contacting the lower wire, in which a dopant region containing a component of the diffusion barrier is formed in the lower wire in the extension direction of the via hole.
申请公布号 US7629239(B2) 申请公布日期 2009.12.08
申请号 US20080336028 申请日期 2008.12.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 OH JUN-HWAN;MAENG DONG-CHO;KIM SOON-HO
分类号 H01L21/265;H01L23/48 主分类号 H01L21/265
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