| 摘要 |
PURPOSE: A probing apparatus is provided to perform the exact test by exhausting the first space between the chuck top and the probe card and the second space between the probe card and performance board. CONSTITUTION: A probe card(16) comprises the wiring board(40) having a plurality of wirings and the needle having a plurality of contactors(44). The performance board(20) is supported in the card bed leaving interval in the upside of the probe card. The intermediate(22) is arranged under the performance board and is close to both sides of the performance board and probe card. The first seal equipped with the seal ring(90) encloses the first space(84) between the probe card and the chuck top(30). The second room encloses the second space(92) between the performance board and the probe card.
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