| 发明名称 |
Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method |
| 摘要 |
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.
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| 申请公布号 |
US7630118(B2) |
申请公布日期 |
2009.12.08 |
| 申请号 |
US20040868191 |
申请日期 |
2004.06.16 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
ONVLEE JOHANNES |
| 分类号 |
G02B26/00;G02B26/08;G03F7/20;H01L21/027 |
主分类号 |
G02B26/00 |
| 代理机构 |
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