| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the flatness of a chuck by easily adjusting the height at each point supporting the back of the chuck. <P>SOLUTION: An opening is provided closer to the central part side than the peripheral edge part of the chuck 10 holding a substrate 1, and a support plate 40 supporting a lid 14 is provided in the periphery of the opening at the back of the chuck 10. A chuck support table 30 supporting the back of the chuck 10 at a plurality of points is provided with a plurality of height adjusting mechanisms, which adjust the heights of the points supporting the back of the chuck 10. The chuck 10 is mounted on the chuck support table 30, the height adjusting mechanism closer to the central part side than the peripheral edge part of the chuck 10 is operated from the opening, and the other height adjusting mechanisms are operated from the outside of the chuck 10 to thereby adjust the height of each point supporting the back of the chuck 10. The lid 14 is fitted to the opening of the chuck 10. Thus, even when the chuck 10 is large-sized, the height of each point supporting the back of the chuck 10 can be easily adjusted to improve the flatness of the chuck 10. <P>COPYRIGHT: (C)2010,JPO&INPIT |
