发明名称 MANUFACTURING METHOD OF COATED CUTTING TOOL
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a coated cutting tool superior in surface smoothness, capable of reducing a droplet amount of a film surface in AIP method. Ž<P>SOLUTION: In the coated cutting tool coated with the film by the AIP method, the film comprises Al<SB>a</SB>Cr<SB>b</SB>O<SB>c</SB>N<SB>d</SB>, wherein a, b, c, and d represent atomic ratios, respectively, and a+b+c+d=100, a>b, (a+b)<(c+d), 57≤c≤67, 16≤a≤29, 3≤b≤17.5, 0.5≤d≤7. In a process for forming the film, a mixture gas of oxygen gas and nitrogen is used, and when the flow rate (sccm) of the oxygen gas is represented by FR<SB>O</SB>and the flow rate (sccm) of the nitrogen gas is represented by FR<SB>N</SB>, the relation: 0.02≤FR<SB>O</SB>/FR<SB>N</SB>≤0.2 is satisfied. The pressure P(Pa) of the mixture gas is in a range of 3≤P≤15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009279690(A) 申请公布日期 2009.12.03
申请号 JP20080132799 申请日期 2008.05.21
申请人 HITACHI TOOL ENGINEERING LTD 发明人 ISHIKAWA TAKASHI
分类号 B23B27/14;B23P15/28;C23C14/06;C23C14/24 主分类号 B23B27/14
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