MEASURING INSTRUMENT FOR PHASE DIFFERENCE DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To measure the phase difference distribution of a measuring target article changed in phase difference over a wide range. SOLUTION: A phase difference measuring part equipped with a polarizer of a parallel nicol, an analyzer and an imaging spectroscope to detect the two-dimensional transmitted light spectral diffraction spectrum is used to calculate the added-up spectrum actually measured value IT'[=I(0)/I0(0)+I(45)/I0(45)] at the respective positions on the measuring target article from transmitted light spectral diffraction spectra I0(0) and I0(45) when the polarization orientations by the polarizer and the analyzer in a measuring target article absent state are 0°and 45°and the transmitted light spectral diffraction spectra I(0) and I(45) at every position on the measuring target article when the polarization orientations by the polarizer and the analyzer at the time when the measuring target article is relatively moved with respect to the phase difference measuring part are 0°and 45°. The comparison with a plurality of added-up spectrum IT[=(C+3)/2] calculated values different in phase difference is performed at the respective positions on the measuring target article to set the phase difference corresponding to ITbecoming minimum in the phase difference to the phase difference Rm(λ) at the respective positions. COPYRIGHT: (C)2010,JPO&INPIT