| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface light emitting laser element that can expand the beam diameter of a laser beam at the emitting surface without increasing the thickness of the element, and its production process. Ž<P>SOLUTION: A level resonator surface emitting laser element 101 includes an n-type InP substrate 11, an InGaAlAs active layer 61 formed on the n-type InP substrate 11, a resonator for resonating light generated at the InGaAlAs active layer 61 in a longer direction, a mirror 18 for reflecting at least a part of a laser beam, resonating inside the resonator, in a direction of the n-type InP backside of substrate 11 and a lens 31 with a low refractive index formed on the optical axis of a laser beam reflected by the mirror 18 so as to emit the laser beam externally, the lens having a convex light emission surface. The low refractive index lens 31 has a refractive index different than that of the n-type InP substrate 11 and an optical plane of incidence formed so that the radiation angle of the laser light incident from the mirror 18 may be expanded. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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