发明名称 |
Image Processing System and Scanning Electron Microscope |
摘要 |
The present invention achieves the process of easily registering a template which is prepared for a size change in pattern matching for specifying a measurement point, and high-speed pattern matching by which adequate position accuracy can be obtained in measurement. The present invention includes means for automatically calculating the size and position of a positioning template different from a measurement point itself when the measurement point is designated, to display a template having the calculated size and position. The present invention further includes means for performing pattern matching by using all or some of a plurality of divided templates and extracting templates having a similar positional relationship to the original positional relationship.
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申请公布号 |
US2009295914(A1) |
申请公布日期 |
2009.12.03 |
申请号 |
US20080053287 |
申请日期 |
2008.03.21 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SATO YOSHIMICHI;IKEDA MITSUJI;SASAJIMA FUMIHIRO |
分类号 |
H04N7/18;G06K9/00 |
主分类号 |
H04N7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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