METHOD FOR FORMING A COMPOUND SEMI-CONDUCTOR THIN-FILM
摘要
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
申请公布号
WO2009146063(A1)
申请公布日期
2009.12.03
申请号
WO2009US39103
申请日期
2009.04.01
申请人
SUNLIGHT PHOTONICS INC.;BRUCE, ALLAN, JAMES;FROLOV, SERGEY;CYRUS, MICHAEL