APPARATUS FOR MEASURING CONCENTRATION OF CHEMICAL SOLUTION

摘要

PURPOSE: An apparatus for measuring concentration of chemical solution is provided to reduce the residual of the chemical solution remaining within the chemical solution concentration measurer. CONSTITUTION: The concentration measuring apparatus(110) measures the concentration of the chemical solution supplied by a chemical solution tank. The substitution solution supplying unit(120) supplies the substitution solution discharging the chemical solution measured from the concentration measuring apparatus to outside. The chemical supply tube(150) supplies the chemical solution or the substitution solution to the concentration measuring apparatus. The bypass piping(160) bypasses the residual quantity of the chemical solution or the substitution solution and discharges it to outside. The chemical solution exhausting line(170) discharges the chemical solution or the substitution solution to outside.