发明名称 PHOTOSENSITIVE ADHESIVE COMPOSITION, PHOTOSENSITIVE ELEMENT USING THE SAME, FORMING METHOD FOR RESIST PATTERN, AND BONDING METHOD FOR MEMBER TO BE BONDED
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive adhesive composition having excellent developability and a sufficiently high photosensitive characteristic, and further excellent in a bonding strength and reliability of a cured film, a photosensitive element using the same, a forming method for a resist pattern, and a bonding method for a member to be bonded. <P>SOLUTION: This photosensitive adhesive composition contains (A) a polybenzoxazole precursor expressed by General Formula (1) where U or V represents a divalent organic group, at least one of the U or V is a group containing 1-30C aliphatic chain structure, or at least one of the U or V is a group expressed by General Formula (2), and where R<SP>1</SP>and R<SP>2</SP>respectively are independently a trifluoromethane and a is 1-30 of integer, in the General Formula (2), (B) a photopolymerizable compound having an ethylenic unsaturated group in its molecule, (C) a photopolymerizable initiator, and (D) an epoxy resin. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009282491(A) 申请公布日期 2009.12.03
申请号 JP20080296797 申请日期 2008.11.20
申请人 HITACHI CHEM CO LTD 发明人 SESATO YASUHIRO
分类号 G03F7/037;C08G73/22;C09J4/00;C09J5/06;C09J11/06;C09J163/00;C09J179/04;G03F7/004;G03F7/075;G03F7/40;H01L21/027 主分类号 G03F7/037
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