JOINT DEVICE, FLUID SUPPLY APPARATUS, TEMPERATURE ADJUSTING APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, STAGE APPARATUS AND FLUID BEARING
摘要
<P>PROBLEM TO BE SOLVED: To provide a joint device capable of suppressing liquid leakage. <P>SOLUTION: The joint device includes: a first member having a first flow passage formed therein; a second member having a second flow passage formed therein and different from the first member; a supporting section rotatably connecting the first member to the second member in a state where the first flow passage is conducted to the second flow passage; and a gas bearing disposed between the first member and the second member. <P>COPYRIGHT: (C)2010,JPO&INPIT
