HALOGENATED POLYSILANE AND PLASMA-CHEMICAL PROCESS FOR PRODUCING THE SAME

摘要

The invention relates to a halogenated polysilane (referred to in the following as polysilane) as a pure compound or as a mixture of compounds and to a plasma-chemical process for producing the same. The polysilane is particularly soluble and fusible and is characterized by significant product signals in special chemical shifts in 29Si NMR spectra. The process for producing the halogenated polysilane is characterized by using a low hydrogen portion and an especially low power density regarding the plasma discharge, thereby allowing the production of a halogenated polysilane which is particularly soluble.