| 摘要 |
PURPOSE: A furnace is provided to reduce the time required in substrate loading, by forming an opening in the bottom of the chamber and then loading a boat loaded with a substrate through the opening. CONSTITUTION: An opening is formed in order for a substrate to enter a chamber(110). A shutter plate(200) is combined to the opening as being formed flatly. Plural arms are formed in the peripheral part of the shutter plate. An operation part is connected to the end of the arm. The opening is opened and closed as the shutter plate is moved by the operation part. The operation part comprises cylinder parts(210a,210b) moving the shutter plate, a guide rail(230) and a shutter flange(240).
|
