| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide equipment for measuring a position which can suppress falloff of the accuracy in measurement of positional information on a moving body. <P>SOLUTION: The position measuring equipment including an encoder system has a grid plate which has a first surface and a second surface on the opposite side to the first surface, an encoder head which is disposed on the moving body and opposed to the first surface, and a temperature adjusting device which adjusts the temperature of the grid plate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
