| 发明名称 |
FERROELECTRIC FLUORIDE CRYSTAL |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ferroelectric fluoride crystal achieving SHG (second harmonic generation) in a UV/VUV (ultraviolet-vacuum ultraviolet) region and having high durability to a laser having a wavelength in the UV/VUV region. Ž<P>SOLUTION: The total amount of potassium, sodium and lutetium contained in a crystal of a fluoride represented by Ba<SB>1-y</SB>(Mg<SB>1-x</SB>Zn<SB>x</SB>)<SB>1+y</SB>F<SB>4</SB>(wherein 0≤x≤1 and -0.2≤y≤0.2) is confined to ≤30 ppm by weight to provide the ferroelectric fluoride crystal. When the ferroelectric fluoride crystal is irradiated with ≥104 pulses of an ArF excimer laser having an energy density of 5-100 (mJ/cm<SP>2</SP>pulse), reduction in transmittance for a light having a wavelength of 193 nm is ≤10% per 5 mm thickness. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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| 申请公布号 |
JP2009280459(A) |
申请公布日期 |
2009.12.03 |
| 申请号 |
JP20080135885 |
申请日期 |
2008.05.23 |
| 申请人 |
HITACHI CHEM CO LTD;NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
AOSHIMA MASAHIRO;NACHIMUSU SENGUTTOBAN;SUMIYA KEIJI;SHIMAMURA SEISHI;VILLORA GARCIA |
| 分类号 |
C30B29/12;C01F11/22;C01G9/04;G02B1/02 |
主分类号 |
C30B29/12 |
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